2 results listed
This study aims to fabricate Electro Thermal Micro Actuator with support structure by using Two-
Photon Polymerization (2PP) technique based 3D printer. This study was carried out with the 3D
printer which is possible to fabricate the actuator which can be fabricated by the traditional Micro
Electro Mechanical System (MEMS) methods. Due to the high cost of traditional MEMS methods,
difficult and excessive processing, many studies have been carried out for new fabrication methods.
2PP is the most widely used and developed method of production. With this method, direct fabrication
up to nano level is possible. Also, many chemical processes used in traditional methods will not be
applied using 2PP based 3D printers.
The design of the bi-directional movable Electro Thermal Micro Actuator is carried out in this study.
Supported structures with a diameter of 2 microns allow the Actuator to be fabricated without
breakage. 2PP method of the 2-micron length of the very easy and low-cost production was seen in
this study. Thanks to this method, traditional MEMS production methods will be replaced by 3D
printers in the following years.
International Congress on 3D Printing (Additive Manufacturing) Technologies and Digital Industry
3D-PTC2019
Ishak ERTUGRUL
Nihat AKKUŞ
Huseyin YUCE
This study aims to fabricate Electro Thermal Micro Actuator based on Micro Electro Mechanical
System (MEMS) with the 3D printer using Projection Micro Stereo Lithography (PµSL) technique.
The production of the actuator produced by traditional MEMS fabrication methods with a 3D printer
has been carried out in this study. The cost of traditional MEMS fabrication methods is high, and there
are many techniques to achieve the process. On the other hand, some methods have been developed to
obtain better quality and low-cost production as parallel to the development of technology. One of
these methods is to use 3D printers employing PµSL technique. Using these printers, it is possible to
reduce both the cost and workload of the production process the MEMS systems. In this study, it is
investigated and stated that Nano level fabrication would be possible with 3D printers in the following
years. It can also be predicted that traditional MEMS production methods will be replaced by 3D
printers soon.
International Congress on 3D Printing (Additive Manufacturing) Technologies and Digital Industry
3D-PTC2019
Ishak ERTUGRUL
Nihat AKKUŞ
Huseyin YUCE
H. Metin ERTUNC